The 76th JSAP Autumn Meeting, 2015

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Poster presentation

8 Plasma Electronics » 8 Plasma Electronics（Poster)

[15p-PB2-1~53] 8 Plasma Electronics（Poster)

Tue. Sep 15, 2015 6:30 PM - 8:30 PM PB2 (Shirotori Hall)

6:30 PM - 8:30 PM

△ [15p-PB2-34] High Conductive Cu Thin Film Deposition Using RF-driven Atmospheric Pressure Plasma Jet

〇Yuta Aizawa1, Masaaki Nagatsu1,2 (1.Graduate school Shizuoka University, 2.Graduate School of Science and Technology, Shizuoka Univ)

Keywords:plasma,Cu Thin Film