The 76th JSAP Autumn Meeting, 2015

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Poster presentation

8 Plasma Electronics » 8 Plasma Electronics（Poster)

[15p-PB2-1~53] 8 Plasma Electronics（Poster)

Tue. Sep 15, 2015 6:30 PM - 8:30 PM PB2 (Shirotori Hall)

6:30 PM - 8:30 PM

[15p-PB2-43] Deposition of the Si-doped carbon thin film using a magnetron sputtering

〇(M1)Suguru Ohkochi1, Takayuki Ohta1, Akinori Oda2, Hiroyuki Kousaka3 (1.Meijo Univ., 2.Chiba Inst., 3.Nagoya Univ.)

Keywords:sputtering,Diamond-Like Carbon