[15p-PB2-1~53] 8 Plasma Electronics（Poster)

[15p-PB2-42] Deposition of nitrogen-containing polymer thin film with atmospheric pressure plasma

〇Toshiki Matsubayashi¹ (1.SIT)

Keywords:atmospheric pressure plasma,thin film

By atmospheric pressure plasma polymerization, I perform hydrophilic nitrogen-containing polymer film formation and report the choice of the monomer to use, the optimization of the plasma condition and a film evaluation. The evaluation method is MALDI, XPS, three points of imaging ellipsometry. The result was able to achieve hydrophilic polymer film generation. In addition, processing areas more effective than conventional plasma jet were very extended with 55mm in diameter.