The 76th JSAP Autumn Meeting, 2015

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Poster presentation

8 Plasma Electronics » 8 Plasma Electronics（Poster)

[15p-PB2-1~53] 8 Plasma Electronics（Poster)

Tue. Sep 15, 2015 6:30 PM - 8:30 PM PB2 (Shirotori Hall)

6:30 PM - 8:30 PM

[15p-PB2-52] Characteristics of AlGaN Surfaces Etched by UV Light-Assisted CF4 Plasma

〇Masahito Niibe1, Retsuo Kawakami2, Yoshitaka Nakano3, Noritaka Takehira1, Shodai Hirai1, Yuma Araki1, Chisato Azuma2, Takashi Mukai4 (1.Univ. of Hyogo, 2.Univ. of Tokushima, 3.Chubu Univ., 4.Nichia Corp.)

Keywords:AlGaN/GaN,Normally off,Plasma induced damage