[16a-1B-1~12] 21.1 Joint Session K

[16a-1B-1] Change of surface properties of Ga-doped ZnO thin films by thermal annealing

〇Hisao Makino^1,2, Lukman Nulhakim², Nomoto Jun-ichi¹, Yamamoto Tetsuya¹ (1.Res. Inst. of KUT, 2.Kochi Univ. of Tech.)

Keywords:ZnO,oxide,surface

The surfacfeproperties of Ga-doped ZnO thin films were characterized by x-ray photoemission spectroscopy.It was found that the surface properties were changed depending on the growth condition.