[16a-1B-1~12] 21.1 Joint Session K

△ [16a-1B-3] Incident energy and ionization rates of flying particles during the growth of Ga-doped ZnO films by the reactive plasma deposition with dc arc discharge

〇Hisashi Kitami¹, Toshiyuki Sakemi¹, Junichi Nomoto², Hisao Makino^2,3, Yasushi Aoki¹, Takanori Kato¹, Tetsuya Yamamoto² (1.SHI, 2.Research Inst., Kochi Univ. Tech., 3.Kochi Univ. Tech.)

Keywords:Taransparent Condictive Oxide,ZnO,Plasma diagnostics