[16a-1D-1~12] 15.4 III-V-group nitride crystals

[16a-1D-4] Wide Area Nanotemplate Selective Area Growth of InGaN/GaN Regularly Nanocolumns on Nanoimprint-Patterned AlN/Si Substrates

〇Kouji Yamano¹, Katsumi Kishino^1,2 (1.Sophia Univ., 2.Sophia Nanotech Research center)

Keywords:GaN,Nanocolumns,Nanoimprint