[16a-2K-1~12] 1.3 Novel technologies and interdisciplinary engineering

[16a-2K-4] Evaluation of antenna-coupled bolometer detector fabricated on Si₃N₄/SiO₂ membrane

〇Takashi Uchida¹, Akihito Matsushita¹, Takashi Tachiki¹ (1.National Defense Academy)

Keywords:microbolometer,antena-coupled device,membrane