The 76th JSAP Autumn Meeting, 2015

Presentation information

Oral presentation

8 Plasma Electronics » 8.5 nanotechnology.

[16a-2Q-1~9] 8.5 nanotechnology.

Wed. Sep 16, 2015 9:00 AM - 11:15 AM 2Q (231-1)

座長:野崎 智洋(東工大)

9:00 AM - 9:15 AM

[16a-2Q-1] Characterization of self-assembled silver particles pattern reduced by argon and ammonia mixed atomospheric pressure plasma process

〇Naoya Kihara1,2, Ella Blanquet1,2, Yu Hiraoka1, Osamu Sakai1,2 (1.Kyoto Univ., 2.Univ. Shiga Pref.)

Keywords:silver particles,micropattern,hydrazine