9:00 AM - 9:15 AM
[16a-2Q-1] Characterization of self-assembled silver particles pattern reduced by argon and ammonia mixed atomospheric pressure plasma process
Keywords:silver particles,micropattern,hydrazine
Oral presentation
8 Plasma Electronics » 8.5 nanotechnology.
Wed. Sep 16, 2015 9:00 AM - 11:15 AM 2Q (231-1)
座長:野崎 智洋(東工大)
9:00 AM - 9:15 AM
Keywords:silver particles,micropattern,hydrazine