[16a-2R-1~11] 13.2 Exploratory Materials, Physical Properties, Devices

[16a-2R-4] Ion beam analysis of oxidation behavior of β-FeSi₂/Si

〇Yoshihito Maeda^1,2, Yuya Noguchi¹, Yoshikazu Terai¹, Kazumasa Narumi², Seiji Sakai² (1.Kyutech, 2.JAEA)

Keywords:semiconducting silicide,iron silicide,light emission

We have reported direct formation of β/SiO₂ nanocomposites from β/Si one by emplying a selective oxidation process and photoluminesence near room temperature from the β/SiO₂ nanocomposite. In this study, using ion beam analysis we invesitigated the oxidation process of β/Si nanocomposites and a rate behavior to control oxidation.