[16a-2R-1~11] 13.2 Exploratory Materials, Physical Properties, Devices

[16a-2R-8] Activation processes of impurities in B-doped β-FeSi₂ polycrystalline thin films

〇Tetsu Hattori¹, Yusuke Mimura¹, Takahiko Higashi¹, Haruki Yamaguchi¹, Yoshikazu Terai^1,2 (1.Kagoshima Univ., 2.Kyushu Inst. of Tech.)

Keywords:silicide