[16a-4E-1~8] 7.1 X-ray technologies

[16a-4E-8] Two-temperature conservative radiation hydrodynamic simulation on Laser-irradiated tin plasmas for EUV light source

〇Atsushi Sunahara¹, Yasushi Takeuchi¹, Katsunobu Nishihara², Akira Sasaki³ (1.Inst. Laser Tech., 2.ILE Osaka Univ., 3.APRI JAEA)

Keywords:Semiconductor Lithography,Radiation Hydro simulation,Laser-generated tin plasmas

We have developed two-dimensional two-temperature conservative radiation hydrodynamic simulation code in order to simulate the laser-irradiated tin plasmas for developing EUV light sources. Our previous non-conservative code gives numerical error for a long-term calculation over 100ns. In the presentation we will show the test results and temporal evolution of the laser-irradiated tin plasmas by our new code.