[16p-2Q-1~13] 8.3 deposition of thin film and surface treatment

[16p-2Q-10] Nitriding of die steel inner of high aspect ratio using intense nitrogen ion beam

〇Yasuhiro Hara¹, Tamio Hara^1,2 (1.Plasma R&D Lab. Co., Ltd, 2.Toyota Tech Inst.)

Keywords:ion beam nitriding,inner of high aspect ratio

Nitriding treatment of steel is to diffuse atomic nitrogens into the steel bulk from the surface, which leads to enhancement of the steel surface hardness. Ion nitriding has been used to enhance the surface hardness and wear resistance of mold steels, cutting tools and mechanical parts. In the case of the conventional ion nitriding method, it is difficult to nitride the inside walls of the narrow steel slit inner of high aspect ratio. Nitriding of the inside walls of the slit with high aspect ratio has been studied by use of the atomic nitrogen ion beam extracted from the electron beam excited plasma (EBEP).