[16p-2Q-1~13] 8.3 deposition of thin film and surface treatment

△ [16p-2Q-2] Effect of blowing source gas in DLC coating on inner surface of narrow tube by MVP method

〇YOSHIHIKO HAGIYAMA¹, Hiroyuki Kousaka¹, Noritsugu Umehara¹ (1.Nagoya Univ.)

Keywords:CVD,DLC,Internal coating

DLC coating on inner surface of narrow tube is required because it can reduce friction loss and wear. We have been suggesting the method called MVP which enables us to deposit DLC film on inner surface of narrow tube whose diameter is in the range of millimeter. However, the hardness of DLC film deposited by MVP method is still small. In order to solve this problem, we investigated the effect of blowing source gas to the substrate on the property of DLC film such as hardness.