2:15 PM - 2:30 PM
[16p-4E-3] Investigation of Resolution and Homogeneity Degradation in Scan Projection Exposure Using a Gradient-Index Lens Array
Keywords:large field,scan,lens array
Presentation information
Oral presentation
7 Beam Technology and Nanofabrication » 7.3 Micro/Nano patterning and fabrication
[16p-4E-1~11] 7.3 Micro/Nano patterning and fabrication
Wed. Sep 16, 2015 1:45 PM - 4:45 PM 4E (437)
座長:山口 徹(ＮＴＴ),岡田 真(兵庫県立大),柳下 崇(首都大)