〇Shinichi Ikeda^{1, 2}, Takeshi Nishimura³, Tetsuya Ozawa⁴, Tohru Nagasawa³, Seiichi Takasu³, Shiro Hara^{1, 2} (1.AIST, 2.MINIMAL, 3.Canon Machinery, 4.Rigaku)

〇Noriko Miura¹, Takeshi Aizawa^{1, 2}, Takeshi Yamada^{1, 2}, Takahiro Ito^{1, 3}, Haruki Toonoe¹, Shinichi Ikeda^{1, 4}, Yuuki Ishida^{1, 4}, Takanori Mikahara¹, Yasuhiro Onishi^{1, 2}, Sommawan Khumpuang^{1, 4}, Shiro Hara^{1, 4} (1.MINIMAL, 2.YONEKURA, 3.ORIENTAL MOTER, 4.AIST)

〇Katsuhiko Nakato¹, Fumito Imura¹, Hitoshi Asano¹, Shinnosuke Suzuki^{1, 3}, Shogo Matsuda^{1, 3}, Ayami Yaginuma^{1, 3}, Kiyohiko Morikawa^{1, 3}, Masashi Hattori^{1, 3}, Shinichi Ikeda^{1, 2}, Sommawan Khumpuang^{1, 2}, Shiro Hara^{1, 2} (1.MINIMAL, 2.AIST, 3.Koyo Thermo System)

〇kazushige sato¹, Haruki Toonoe¹, Takashi Chiba^{1, 3}, Masao Terada^{1, 3}, Katsuhiko Nakato¹, Noriko Miura¹, Shinichi Ikeda^{1, 2}, Sommawan Khumpuang^{1, 2}, Shiro Hara^{1, 2} (1.Minimal Fab Development Association, 2.AIST, 3.Sakaguchi E.H VOC Corp)

〇NING LI¹, HITOSHI HABUKA¹, TAKANORI MIKAHARA², SHIN-ICHI IKEDA^{2, 3}, YUUKI ISHIDA^{2, 3}, SHIRO HARA^{2, 3} (1.Yokohama National Univ., 2.MINIMAL, 3.AIST)

〇Shuuji Okuda¹, Sho Takeuchi^{1, 2}, Yoshihisa Sensu^{1, 2}, Takahiro Ito^{1, 3}, Sommawan Khumpuang^{1, 4}, Shiro Hara^{1, 4} (1.MINIMAL, 2.LTJ, 3.OrientalMotor, 4.AIST)

〇Yuuji Kitayama¹, Syuuji Okuda¹, Yasuhide Higashino¹, Kouyu Houchi¹, Sommawan Khumpuang^{1, 2}, Shiro Hara^{1, 2} (1.MINIMAL, 2.AIST)

〇Takashi Yajima¹, Masaharu Yasui¹, Khumpuang Sommawan^{1, 2}, Hitoshi Maekawa^{1, 2}, Shiro Hara^{1, 2} (1.MINIMAL, 2.AIST)