The 62nd JSAP Spring Meeting, 2015

Presentation information

Oral presentation

13 Semiconductors » 13.8 Compound and power electron devices and process technology

[11a-A21-1~11] 13.8 Compound and power electron devices and process technology

Wed. Mar 11, 2015 9:00 AM - 12:00 PM A21 (6A-213)

10:00 AM - 10:15 AM

[11a-A21-5] InGaAs-HEMTs with Slant Field Plate Structures

〇Tomohiro Yoshida1, Shinya Hatakeyama1, Nana Yasukawa1, Taiichi Otsuji1, Tetsuya Suemitsu1 (1.RIEC, Tohoku Univ.)

Keywords:InGaAs-HEMT,Field Plate,Break Down