The 62nd JSAP Spring Meeting, 2015

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13 Semiconductors » 13.8 Compound and power electron devices and process technology

[11a-A21-1~11] 13.8 Compound and power electron devices and process technology

Wed. Mar 11, 2015 9:00 AM - 12:00 PM A21 (6A-213)

11:00 AM - 11:15 AM

△ [11a-A21-8] Analysis of Charge Density Instability in SiC-PN Diodes by measuring capacitance

〇Hiroyuki Matsushima1, Hiroyuki Okino1, Kazuhiro Mochizuki1, Renichi Yamada1 (1.Hitachi CRL)

Keywords:SiC,termination,capacitance measurment