The 62nd JSAP Spring Meeting, 2015

Presentation information

Print

Oral presentation

13 Semiconductors » 13.5 Semiconductor devices and related techologies

[11a-A23-1~12] 13.5 Semiconductor devices and related techologies

Wed. Mar 11, 2015 9:00 AM - 12:15 PM A23 (6A-216)

10:15 AM - 10:30 AM

△ [11a-A23-6] Scaling the channel length of InGaAs-MOSFET

〇Kazuto Ohsawa1, Yuichi Mishima1, Yasuyuki Miyamoto1 (1.Tokyo Tech)

Keywords:InGaAs-MOSFET,proximity effects correction