The 62nd JSAP Spring Meeting, 2015

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13 Semiconductors » 13.5 Semiconductor devices and related techologies

[11a-A23-1~12] 13.5 Semiconductor devices and related techologies

Wed. Mar 11, 2015 9:00 AM - 12:15 PM A23 (6A-216)

10:00 AM - 10:15 AM

[11a-A23-5] Mobility enhancement of front-gate InAs/GaSb-OI p-MOSFETs on Si wafers

〇Koichi Nishi1, 3, Masafumi Yokoyama1, Haruki Yokoyama2, 3, Takuya Hoshi2, 3, Hiroki Sugiyama2, 3, Mitsuru Takenaka1, 3, Shinichi Takagi1, 3 (1.Tokyo Univ., 2.NTT Device Technology Lab., 3.JST CREST)

Keywords:GaSb,MOSFET,Wafer bonding