[11a-A23-1~12] 13.5 Semiconductor devices and related techologies

[11a-A23-4] A Study of Interactions in Stacked Transistors by Device Simulation

〇Junichi Hattori¹, Koichi Fukuda¹, Hiroyuki Ota¹, Tatsuro Maeda¹ (1.AIST)

Keywords:stacked transistors,device simulation,TCAD