Printing deposition of thin Cu films using nanosilicon ballistic electron emtter

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si wafer processing /MEMS/Integration technology

Wed. Mar 11, 2015 9:00 AM - 12:30 PM A29 (6A-204)

9:45 AM - 10:00 AM

〇Ryutaro Suda¹, Mamiko Yagi¹, Akira Kojima¹, Romain Mentek¹, Jun-ichi Shirakashi¹, Nobuyoshi Koshida¹ (1.Tokyo Univ. of Agri. & Technol.)

Keywords:electron emitter,thin film deposition,reduction