[11a-A29-1~13] 13.4 Si wafer processing /MEMS/Integration technology

[11a-A29-6] Process Issues in Optical Integrated Circuits using Silicon Photonics Technology (I) Precise Dimension Control and Monitoring

〇Tsuyoshi Horikawa^{1, 2}, Daisuke Shimura², Seok-Hwan Jeong², Masatoshi Tokushima², Keizo Kinoshita², Tohru Mogami² (1.AIST, 2.PETRA)

Keywords:silicon photonics,optical waveguides,optical integrated circuits