[11a-C2-1~13] 16.3 Bulk, thin-film and other silicon-based solar cells

[11a-C2-7] Fabrication of AlOx film by a new aluminum source, and application for c-Si solar cell passivation

〇Kiyoshi Takahashi¹, Soichiro Todoroki², Shinsuke Miyajima² (1.Nippon Aluminum Alkyls, Ltd., 2.Graduate School of science and Engineering, Tokyo Tech.)

Keywords:alumina film,ALD,passivation film