[11a-D1-1~8] Joint Session K

[11a-D1-8] Evaluation of IGZO thin films by using ESR

〇Yusuke Nonaka¹, Yoichi Kurosawa¹, Yoshihiro Komatsu¹, Noritaka Ishihara¹, Masashi Oota¹, Motoki Nakashima¹, Takuya Hirohashi¹, Masahiro Takahashi¹, Toshimitsu Obonai², Yasuharu Hosaka², Junichi Koezuka², Shunpei Yamazaki¹ (1.SEL, 2.AFD Inc.)

Keywords:ESR,IGZO,conductivity