[11a-D8-1~10] 6.4 Thin films and New materials

[11a-D8-5] Formation of TiO₂ films by the thermal oxidization of titanium films deposited by a glancing angle deposition

〇Youichi Hoshi¹, Shin-ichi Kobayashi¹, Naoto Kitahara¹, Yutaka Sawada¹ (1.Tokyo Polytech Univ.)

Keywords:titanium oxide,glancing angle deposition,photo-catalytic material