The 62nd JSAP Spring Meeting, 2015

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6 Thin Films and Surfaces » 6.4 Thin films and New materials

[11a-D8-1~10] 6.4 Thin films and New materials

Wed. Mar 11, 2015 9:00 AM - 11:45 AM D8 (16-303)

10:30 AM - 10:45 AM

[11a-D8-6] SnO2 thin films prepared with two-dimensional non-equilibrium plasma

Syota Kanezashi1, Toshimichi Hanai1, Masato Tan1, 〇Masayuki Okuya1, 2 (1.Shizuoka Univ., 2.Green Energy, Shizuoka Univ.)

Keywords:surface discharge,plasma,tin oxide