The 62nd JSAP Spring Meeting, 2015

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6 Thin Films and Surfaces » 6.4 Thin films and New materials

[11a-D8-1~10] 6.4 Thin films and New materials

Wed. Mar 11, 2015 9:00 AM - 11:45 AM D8 (16-303)

10:45 AM - 11:00 AM

[11a-D8-7] TiO2 thin films prepared with non-equilibrium plasma under controlled atmosphere

〇YUKI MASUDA1, MASATO TAN1, SYOTA KANEZASHI1, MASAYUKI OKUYA1, 2 (1.Shizuoka Univ., 2.Green Energy, Shizuoka Univ.)

Keywords:surface discharge,plasma,titanium oxide