The 62nd JSAP Spring Meeting, 2015

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Poster presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[11a-P4-1~18] 6.2 Carbon-based thin films

Wed. Mar 11, 2015 9:30 AM - 11:30 AM P4 (Gymnasium)

9:30 AM - 11:30 AM

[11a-P4-1] Development of Inexpensive Microwave Plasma CVD Apparatus with Metal Reaction Chamber for High-Quality Diamond Synthesis

〇Msakazu Miyata1, Osamu Maida1, Shouhei Nankou2, Toshimichi Ito1 (1.Osaka Univ., 2.Nisshin Inc.)

Keywords:diamond