9:30 AM - 11:30 AM
[11a-P4-2] Homoepitaxial growth of phosphorus-doped diamond thin films on {111} substrates with various misorientation angles
Keywords:semiconductor,epitaxial growth by microwave plasma assisted CVD
Presentation information
Poster presentation
6 Thin Films and Surfaces » 6.2 Carbon-based thin films
[11a-P4-1~18] 6.2 Carbon-based thin films
Wed. Mar 11, 2015 9:30 AM - 11:30 AM P4 (Gymnasium)