[11a-P4-1~18] 6.2 Carbon-based thin films

[11a-P4-15] The measurement of the adhesion strength of the a-C:F films formed at cryogenic temperature to the substrate by a micro scratch test

〇Haruka Soga¹, Kota Yamai¹, Kyohei Morikawa¹, Tetuya Sato¹, Kiyokazu Nakagawa¹ (1.Univ. of Yamanashi)

Keywords:perfluorocarbon,adhesion,cryogenic temperature