The 62nd JSAP Spring Meeting, 2015

Presentation information

Poster presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[11a-P4-1~18] 6.2 Carbon-based thin films

Wed. Mar 11, 2015 9:30 AM - 11:30 AM P4 (Gymnasium)

9:30 AM - 11:30 AM

[11a-P4-18] Effects of Long-term Irradiation on Photo-induced Volume Changes of a-CNx Films

〇Tomo Harata1, Masami Aono1, Nobuaki Kitazawa1, Yoshihisa Watanabe1 (1.NDA)

Keywords:photo-induced volume changes,amorphous carbon nitride film,long-term irradiation