The 62nd JSAP Spring Meeting, 2015

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17 Nanocarbon Technology » 17 ナノカーボン（ポスター）

[11a-P6-1~56] 17 ナノカーボン（ポスター）

Wed. Mar 11, 2015 9:30 AM - 11:30 AM P6 (Gymnasium)

9:30 AM - 11:30 AM

[11a-P6-52] The etching of the suspended graphene by using He-ion beam milling

〇(M1)Ohta Takechi1, Nozomu Kanetake1, Manoharan Muruganathan1, Anto Yasaka1, 2, Marek Schmidt1, Hiroshi Mizuta1, 3 (1.JAIST, 2.Hitachi High-Tech Science, 3.Univ. of Southampton)

Keywords:Graphene,Helium ion beam,Nano fabrication