[11p-A16-1~11] 3.15 Silicon photonics

△ [11p-A16-2] Low-loss SiN waveguide deposited by ECR-PE CVD method using SiD₄ gas

〇KOTA OKAZAKI^{1, 2}, HIDETAKA NISHI^{1, 2}, TAI TSUCHIZAWA^{1, 2}, TSUYOSHI YAMAMOTO², KOJI YAMADA^{1, 2} (1.NTT Nanophotonics Ctr., 2.NTT Device Technology Labs.)

Keywords:silicon photonics,low-temperature deposition,silicon nitride waveguide