The 62nd JSAP Spring Meeting, 2015

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13 Semiconductors » 13.8 Compound and power electron devices and process technology

[11p-A21-1~12] 13.8 Compound and power electron devices and process technology

Wed. Mar 11, 2015 2:00 PM - 5:15 PM A21 (6A-213)

4:30 PM - 4:45 PM

[11p-A21-10] Electrical properties of AlGaN/GaN heterostructures grown on a step-etched substrate

〇(DC)Shintaro Kodama1, Joel Asubar1, Hirokuni Tokuda1, Satoshi Nakazawa2, Masahiro Ishida2, Tetsuzo Ueda2, Masaaki Kuzuhara1 (1.Univ. of Fukui, 2.Panasonic)

Keywords:AlGaN/GaN