The 62nd JSAP Spring Meeting, 2015

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13 Semiconductors » 13.8 Compound and power electron devices and process technology

[11p-A21-1~12] 13.8 Compound and power electron devices and process technology

Wed. Mar 11, 2015 2:00 PM - 5:15 PM A21 (6A-213)

4:15 PM - 4:30 PM

[11p-A21-9] Fabrication of ultra-thin nanostructures by Hydrogen Environment Anisotropic Thermal Etching

〇(M2)Ryo Kita1, Hachia Ryo1, Akihiko Kikuchi1, 2 (1.Sophia Univ., 2.Sophia Nanotech.)

Keywords:semiconductor,Nitride,Etching