Planar Device Isolation for &beta;-Ga<sub>2</sub>O<sub>3</sub> Field Effect Transistors

Presentation information

Oral presentation

13 Semiconductors » 13.8 Compound and power electron devices and process technology

Wed. Mar 11, 2015 2:00 PM - 5:15 PM A21 (6A-213)

2:45 PM - 3:00 PM

〇ManHoi Wong¹, Kohei Sasaki^{2, 1}, Akito Kuramata², Shigenobu Yamakoshi², Masataka Higashiwaki¹ (1.NICT, 2.Tamura Corp.)

Keywords:Ga2O3,isolation,power device