Optimization of plasma pre-expansion for laser driven EUV light source

Presentation information

Oral presentation

7 Beam Technology and Nanofabrication » 7.1 X-ray technologies

Wed. Mar 11, 2015 1:15 PM - 5:30 PM A26 (6A-201)

4:00 PM - 4:15 PM

〇(PC)Hiraku Matsukuma¹, Kensuke Yoshida¹, Tatsuya Hosoda¹, Shinsuke Fujioka¹, Akifumi Yogo¹, Hiroaki Nishimura¹ (1.Osaka Univ.)

Keywords:EUV light source,laser produced plasma