4:15 PM - 4:30 PM
[11p-A26-12] Dynamics of laser-irradiated tin droplet
Keywords:EUV lithography,Laser plasma,Radiation Hydrodyamics
Oral presentation
7 Beam Technology and Nanofabrication » 7.1 X-ray technologies
Wed. Mar 11, 2015 1:15 PM - 5:30 PM A26 (6A-201)
4:15 PM - 4:30 PM
Keywords:EUV lithography,Laser plasma,Radiation Hydrodyamics