4:30 PM - 4:45 PM
[11p-A26-13] Modeling of fragmentation of the target for EUV source using a self-organizing Lagrangian hydrodynamics simulation
Keywords:EUV source,laser plasma,simulation
Oral presentation
7 Beam Technology and Nanofabrication » 7.1 X-ray technologies
Wed. Mar 11, 2015 1:15 PM - 5:30 PM A26 (6A-201)
4:30 PM - 4:45 PM
Keywords:EUV source,laser plasma,simulation