The 62nd JSAP Spring Meeting, 2015

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si wafer processing /MEMS/Integration technology

[11p-A29-1~13] 13.4 Si wafer processing /MEMS/Integration technology

Wed. Mar 11, 2015 2:00 PM - 5:30 PM A29 (6A-204)

2:00 PM - 2:15 PM

[11p-A29-1] Tactile, Friction, and Temperature Sensor Array for Artificial Electronic Skin

〇Shingo Harada1, Kenichiro Kanao1, Yuki Yamamoto1, Takayuki Arie1, Seiji Akita1, Kuniharu Takei1 (1.Osaka Pref. Univ.)

Keywords:electronic skin