Three-dimensional Structure Formation of Porous Silicon by Pyrogenic Oxidation

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si wafer processing /MEMS/Integration technology

Wed. Mar 11, 2015 2:00 PM - 5:30 PM A29 (6A-204)

4:45 PM - 5:00 PM

〇Masaki Denokami¹, Keita Ishiguro¹, Kanna Aoki¹, Minoru Fujii¹ (1.Kobe Univ.)

Keywords:Porous Silicon