The 62nd JSAP Spring Meeting, 2015

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13 Semiconductors » 13.4 Si wafer processing /MEMS/Integration technology

[11p-A29-1~13] 13.4 Si wafer processing /MEMS/Integration technology

Wed. Mar 11, 2015 2:00 PM - 5:30 PM A29 (6A-204)

3:00 PM - 3:15 PM

[11p-A29-5] A Study on an Energy Harvesting Device (5)

〇Toshifumi Konishi1, Daisuke Yamane2, Takaaki Matsushima1, Kazuya Masu2, Hiroshi Toshiyoshi3, Katsuyuki Machida1, 2 (1.NTT-AT, 2.Tokyo Tech, 3.The Univ. of Tokyo)

Keywords:MEMS,enegy harvesting,simulation