Growth of AlInN layer by UHV sputter epitaxy

Presentation information

Oral presentation

15 Crystal Engineering » 15.4 III-V-group nitride crystals

Wed. Mar 11, 2015 1:15 PM - 6:45 PM B1 (6B-101)

1:15 PM - 1:30 PM

〇(M1)Takeshi Koda¹, Akiyori Tada¹, Yuki Kobashi¹, Susumu Fukui¹, Ai Mizuno¹, Hiroyuki Shinoda¹, Nobuki Mutsukura¹ (1.Tokyo Denki Univ.)

Keywords:AlInN,sputter