The 62nd JSAP Spring Meeting, 2015

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7 Beam Technology and Nanofabrication » 7.3 Micro/Nano patterning and fabrication

[11p-B2-1~11] 7.3 Micro/Nano patterning and fabrication

Wed. Mar 11, 2015 1:15 PM - 4:30 PM B2 (6B-102)

3:15 PM - 3:30 PM

[11p-B2-7] Study of the Resistance of Antisticking Layers against Repeated UV nanoimprint

〇Shuso Iyoshi1, Makoto Okada1, Yuichi Haruyama1, Shinji Matsui1 (1.Univ. of Hyogo Laboratory of Advanced Science and Technology for Industry)

Keywords:UVnanoimprint