The 62nd JSAP Spring Meeting, 2015

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Symposium » State of the art technology in electron and focused-ion-beam apparatuses

[11p-B3-1~9] State of the art technology in electron and focused-ion-beam apparatuses

Wed. Mar 11, 2015 1:15 PM - 5:15 PM B3 (6B-103)

3:45 PM - 4:15 PM

[11p-B3-6] Latest Topics of Focused Ion Beam (FIB) Technology

〇Tatsuya Asahata1 (1.Hitachi Hightech)

Keywords:focused-ion-beam