4:15 PM - 4:45 PM
[11p-B3-7] Helium Ion Microscopy Technology for Characterization and Fabrication
Keywords:helium ion microscope,characterization,fabrication
Presentation information
Symposium
Symposium » State of the art technology in electron and focused-ion-beam apparatuses
[11p-B3-1~9] State of the art technology in electron and focused-ion-beam apparatuses
Wed. Mar 11, 2015 1:15 PM - 5:15 PM B3 (6B-103)