The 62nd JSAP Spring Meeting, 2015

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Symposium » State of the art technology in electron and focused-ion-beam apparatuses

[11p-B3-1~9] State of the art technology in electron and focused-ion-beam apparatuses

Wed. Mar 11, 2015 1:15 PM - 5:15 PM B3 (6B-103)

4:45 PM - 5:00 PM

[11p-B3-8] The 3-D nanostructure fabrication by focused-ion-beam, and its refinement

〇Reo Kometani1 (1.Univ. of Tokyo)

Keywords:focused-ion-beam,chemical vapor deposition,computer pattern generator