The 62nd JSAP Spring Meeting, 2015

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Symposium

Symposium » Advanced CMOS Technology and Its Future Scope

[11p-B5-1~9] Advanced CMOS Technology and Its Future Scope

Wed. Mar 11, 2015 1:15 PM - 5:30 PM B5 (6B-105)

2:30 PM - 2:45 PM

[11p-B5-4] Challenges of leading-edge technology of plasma processing

〇Motohiro TANAKA1, Naoki YASUI1, Michikazu MORIMOTO1, Masaru IZAWA1 (1.Hitachi High-Tech. Corp.)

Keywords:Semiconductor,Plasma,Etching